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Very Compact 1-2 Hz Soft X-Ray Lasers and their Potential Applications

机译:非常紧凑的1-2 Hz软X射线激光器及其潜在应用

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Recently demonstrated lasing action in microcapillary plasmas at 26.2 nm in BV ions at 1 Hz repetition rate using two very low energy and low power lasers is presented in the context of experiments involving laser beam propagation in such plasmas.We are discussing conditions for increasing the gain-length product and the repetition rate for a 13.5 nm laser pumped by subpicosecond laser presently at 2 Hz repetition rate. Potential applications of these soft x-ray lasers for lithography and microscopy are also discussed.
机译:在涉及这种等离子体中的激光束传播的实验的背景下,最近展示了使用两个非常低能量和低功率的激光器以1 Hz重复频率在BV离子中在26.2 nm的微毛细管等离子体中产生的激光作用。 我们正在讨论用于提高亚皮秒激光泵浦的13.5 nm激光器的增益长度乘积和重复率的条件,该激光器目前以2 Hz的重复率进行传输。还讨论了这些软X射线激光器在光刻和显微术中的潜在应用。

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