Oxide coating of plastic film

摘要

Plastic materials have optical clarity and the processing benefits of a thermoplastic, but lack abrasion resistance. Al_2O_3 as well as SiO_x layers perform very well as clear abrasion resistant layers. The typical layr thickness ranges from 1 #mu# m to 6 #mu# m. For the high-rate coating of plastics with abrasion resistant oxide layers a plasma or ion assisted dpeosition process is necessary to achieve desne, galssy laers with the required abrasion resistance. To deposit thick abrasion resistant laers at low cost, deposition rates of more than 100 nm/s are necessary. For such high rates adapted plapted plasma densities and ion current densities of about 30 mA/cnm~2 are necessary.