A Novel Microwave Source for the Deposition of Protective, Tribological and Decorative Coatings: Plasma Characterization and Applications

摘要

The KIT designed a novel MW source with a parabolic reflector to focus the high microwave plasma density directly onto the substrates during the deposition of scratch, corrosion and wear protective, tribological, biocompatible and decorative coatings by a PECVD processes using e.g. siloxane and hydrocarbons as precursor compounds. A number of MW sources can be arranged in line or even lateral to form a larger coating area to be used in Inline coaters or lager batch coating systems, also being easily combined with other PVD sources e.g. planar and rotatable sputter magnetrons, both with the option to be driven with a HiPIMS generator to create new and promising combinations of diverse plasma effects. At the very first it is necessary to characterize the plasma by different diagnostic methods, e.g. Langmuir probe measurements, OES, RFA and others, but also work out the influence of the plasma parameter settings for the properties of the deposited layers, e.g. DLC- or quartz-like-coatings. At least the design has to be optimized in detail to ensure a long-lasting reliable stability of process conditions and product properties in industrial production. First results for all issues will be presented.