Cryopumpos applied to high temp;erature vacuum processes

摘要

Cryopumpos create vacuum by capturing gases on very cold surfaces. Vacuum pump users are often uncertain whether cryopumpos are suitable for use in high temperature processes where the high thermal loads could warm the pumping surfaces and release the captured gases. This paper discusses methods for estimating the thermal loads on a cryopump, and makes suggestions for minimizing their effects.