An integrated microsystem to detect traces of chemical agents (μChemLab{sup}(tm)) is being developed at Sandia for counter-terrorism and nonproliferation applications. This microsystem has two modes of operation: liquid and gas phase detection. For the gas phase detection, we are integrating these critical components: a preconcentrator for sample collection, a gas chromatographic (GC) separator, a chemically selective flexural plate wave (FPW) array mass detector, and a latching valve onto a single chip. By fabricating these components onto a single integrated system (μChemLab{sup}(tm) on a chip), the advantages of reduced dead volume, lower power consumption, and smaller physical size can be realized. In this paper, the development of a latching valve will be presented. The key design parameters for this latching valve are: a volumetric flow rate of 1 mL/min, a maximum hold-off pressure of 40 kPa (6 psi), a relatively low power, and a fast response time. These requirements have led to the design of a magnetically actuated latching relay diaphragm valve. Magnetic actuation is chosen because it can achieve sufficient force to effectively seal against back pressure and its power consumption is relatively low. The actuation time is rapid, and valve can latch in either an open or closed state. A corrugated parylene membrane is used to separate the working fluid from internal components of the valve. Corrugations in the parylene ensure that the diaphragm presents minimum resistance to the actuator for a relativley large deflection. Two different designs and their performance of the magnetic actuation have been evaluated. The first uses a linear magnetic drive mechanism, and the second uses a relay mechanism. Preliminary results of the valve performance indicates that the required driving voltage is about 10 volts, the measured flow rate is about 50 mL/min, and it can hold off pressure of about 5 psi (34 kPa). Latest modifications of the design show excellent performance improvements.
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