Microgrinding with CVD-diamond grinding wheels is an appropriate method for microstruc-turing hard and brittle materials. In order to improve the machining quality when grinding these materials, new CVD-diamond microgrinding wheels were developed and the basic technological parameters were studied. Their use by grinding silicon and aluminum nitride caused cutting forces lower than 1 N. Moreover, even at the hardest investigated material aluminum oxide, they did not cause visible wear, which means that they have a long tool life. Further advantages of these microgrinding wheels are low surface roughnesses at the flute base and marginal edge breakouts.
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