Development of atmospheric pressure glow discharge in oxygen and in air and its application to ozone generation

摘要

Ozone synthesis has been done with the silent electric discharge. A homogeneous glow discharge is thought to be stable only in a low pressure. Recently we could develop a glow discharge at atmospheric pressure in air or in oxygen with a 2 mm gap distance between dielectric plates; we used a 50 Hz source. In the glow plasma, the nergy efficiencies of ozone formation increased to about 15