Active aerostatic thrust bearings can be considered as non-contacting actuators, and can therefore be used for high precision positioning and disturbance rejection. The gap shape control method offers high resolution, bandwidth and force generation capabilities, but it requires a flexible bearing surface plate, which makes the design more complex. This paper presents the active compensation concept and a multiphysics model of the whole active system. Simulation results show the relevance of the plate thickness on the passive dynamic stiffness of the bearing and on the force generation capability of the active bearings, and thus, the need of such multiphysics models to assist in the optimal design of active aerostatic bearings.
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