A Project for the Basic Construction of Vacuum Technology in Korea

摘要

Korea is a leading semiconductor manufacturer in the world and consequently has a huge market for vacuum equipments. A project has been undertaken to improve the facilities for the design and fabrication of vacuum equipment and bring them to an international level. Project was started in five different evaluation areas of vacuum, namely, vacuum pumps, vacuum measuring instruments, vacuum components, vacuum materials and vacuum process diagnostics. These areas are subdivided into 17 systems and then to 72 performance evaluation items. So far the efficiency of the project has been satisfied in all the defined areas. For example, in the area of vacuum pump performance evaluation, we have developed a characteristic evaluation system for low/high vacuum pumps to measure ultimate pressure tolerance, pressure variation and vacuum tolerance. In the area of vacuum sealing techniques we are able to measure deformability, flow coefficient, pressure tolerance, pressure variation and vacuum tolerance for flanges and valves. In the area of vacuum measuring instrument evaluation, we have designed and setup the systems for checking the accuracy, linearity, gas sensitivity, long term stability, temperature characteristics, and pressure variation at initial electric discharge for vacuum gauges. For mass flow controller we can analyze the accuracy of flow rate control, linearity, time response and gas dependence. In the area of vacuum materials evaluation we have the test facility for resistivity, permeability, boiling point, viscosity and vapor pressure of vacuum oils. Finally, we have setup the diagnostic facilities for semiconductor process. The project was started in October 1999 at the Center for Vacuum Technology in KRISS and we are hopeful to achieve all of the targets by October 2003, which is the targeted completion date.