Mass Measurement of Grasped Object with Tweezers Employing by Bimorph Piezoelectric Actuators

摘要

This paper deals with tweezers using bimorph piezoelectric actuators for micromanipulation. One of the tweezers (vibrator) was oscillated at its resonance frequency, and another (grasper) opened and closed the gap between the tips on the bimorph piezoelectric actuators. The resonance frequency changed when the tweezers grasped an object. The relationship between the mass of the object and frequency was obtained.