This paper describes a new penetrating micro-electrode array (MEA) sensor for in situ measurements of dissolved oxygen (DO) in bioapplications. The sensor was fabricated using an HF-based etching technique, with a polymerized polypyrrole layer as an insulator. The sensor area was formed by a gold layer inside a 1.7 驴m recess at the tip of each microelectrode. Electrochemical performance of these DO MEAs was fully characterized by measuring DO of saline solutions with a Ag/AgCl reference electrode. The DO MEAs exhibited a rapid and linear response in the 0-9 mg/L (0-21% O2) range. These new sensors are able to penetrate samples in order to perform measurements, and are ideally suited for in situ operations due to their small size.
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机译：本文介绍了一种新的穿透式微电极阵列（MEA）传感器，用于生物应用中的溶解氧（DO）原位测量。使用基于HF的蚀刻技术，以聚合的聚吡咯层作为绝缘体来制造传感器。传感器区域由位于每个微电极尖端的1.7驴米凹槽内的金层形成。通过使用Ag / AgCl参比电极测量盐溶液的DO可以完全表征这些DO MEA的电化学性能。 DO MEA在0-9 mg / L（0-21％O2）范围内表现出快速且线性的响应。这些新型传感器能够穿透样品以执行测量，并且由于其体积小，非常适合于原位操作。
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