A Silicon Micromechanical Resonator Based CMOS Bandpass Sigma-Delta Modulator

摘要

This paper describes a bandpass 驴驴 modulator employing a silicon micromechanical resonator as the loop filter. The micromechanical resonator is chosen primarily for its high quality factor and low power consumption. A 2nd-order prototype bandpass 驴驴 modulator is realized in a 0.35-驴m CMOS process and tested with a 19.6-MHz silicon micromechanical resonator. The measured results show a peak SNDR of 51dB and a dynamic range of 52.5dB in a 200-kHz signal bandwidth.