A new millimeter-wave stripline resonator with embedded air cavities in LTCC multilayer structure

摘要

We have designed and implemented an innovative low-loss and high-Q millimeter-wave stripline resonator by including air cavities in the LTCC substrate between the ground planes. Measurements of a stripline resonator with air cavities above and below the conducting strip reveal Q-factor of 290 and total loss of 0.03dB/mm at 34.8GHz, and they are improved by 138% and 58%, respectively compared to the conventional LTCC stripline resonator. The dielectric loss of this resonator is analyzed as small as 0.0003dB/mm at the resonant frequency, and that is equivalent to an improvement of a factor of 120 compared to the conventional one. The proposed stripline resonator with the embedded air cavities can meet demands for low-loss millimeter-wave MCM applications.