Microelectromechanical systems (MEMS) technology is considered to be one of key technologies in the coming century. In this paper, the quasi-static finite element method (FEM) is applied to analyze a kind of MEMS microwave transmission line, the finite-grounded coplanar waveguide. The capacitance per unit length and intrinsic impedance of the line are derived. Different materials are calculated to find the proper design parameters.
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