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Next generation manufacturing execution system (mes) enabling fully integrated fab automation in 300mm technology development and manufacturing

机译：下一代制造执行系统（mes），可在300mm技术开发和制造中实现完全集成的晶圆厂自动化

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《》|2005年|P.77-85|共9页
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Mouli; C.;
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1. Development of a system framework for the computer-integrated manufacturing execution system: a distributed object-oriented approach [J] . Fan-Tien Cheng, Eric Shen, Jun-Yan Deng, International Journal of Computer Integrated Manufacturing . 1999 ,第5期

机译：用于计算机集成制造执行系统的系统框架的开发：一种分布式的面向对象方法
2. Manufacturing and assembly automation by integrated metrology systems for aircraft wing fabrication [J] . J Jamshidi, A Kayani, P Iravani, Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture . 2010 ,第1期

机译：通过集成计量系统进行飞机机翼制造的制造和装配自动化
3. Manufacturing and assembly automation by integrated metrology systems for aircraft wing fabrication [J] . J. Jamshidi, A. Kayani, P. Iravani, Proceedings of the Institution of Mechanical Engineers, Part B. Journal of engineering manufacture . 2010 ,第1期

机译：通过集成计量系统进行飞机机翼制造的制造和装配自动化
4. Next Generation Manufacturing Execution System (MES) enabling fully integrated fab automation in 300mm technology development and manufacturing [C] . Chandra Mouli Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop . 2005

机译：下一代制造执行系统（MES）在300mm技术开发和制造中实现完全集成的Fab自动化
5. Justification techniques for computer-integrated manufacturing systems and advanced manufacturing technology: An empirical study. [D] . Brandyberry, Alan Andrew. 1995

机译：计算机集成制造系统的证明技术和先进制造技术：一项实证研究。
6. Improving patient outcomes with regenerative medicine: How the Regenerative Medicine Manufacturing Society plans to move the needle forward in cell manufacturing standards 3D bioprinting artificial intelligence‐enabled automation education and training [O] . Joshua Hunsberger, Carl Simon, Claudia Zylberberg, 2020

机译：再生医学改善患者结果：再生医学制造学会计划如何在细胞制造标准3D生物打印人工智能自动化教育和培训方面取得进步
7. An Overview of Next-generation Manufacturing Execution Systems: How important is MES for Industry 4.0? [O] . Soujanya Mantravadi, Charles Møller 2019

机译：下一代制造执行系统概述：工业4.0的MES有多重要？

Next generation manufacturing execution system (mes) enabling fully integrated fab automation in 300mm technology development and manufacturing

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