Improved performance of top-emitting, oxide-confined VCSELs with self-aligned contact and Cu-plated heatsink

摘要

Vertical-cavity surface-emitting lasers (VCSELs) with a self-aligned top contact and copper-plated heatsink were fabricated and characterized. Thermal resistance was reduced by 44%, and output power and bandwidth were increased by 38% and 12% respectively.