Measurements of spatial distributions of gas temperature and ozone concentration in barrier discharge type of ozonizer

摘要

Spatial distribution of gas temperature was measured on a surface discharge ozonizer. It was measured by the Michelson interferometer using He-Ne laser. Ozonizer has a configuration of thin dielectric material plate (Al/sub 2/O/sub 3/) which is put between a stripe shaped high voltage electrode and grounded electrode. In this experiments oxygen gas with flow rate of 1.5 l/min was used for ozone generation, and ozone concentration of 610 ppm was obtained at discharge power of 0.8 W. At the same time maximum increment of average gas temperature was about 2 C at distance of 2.2 mm from the surface of ozonizer elements.