BioMEMS and microfluidics applications of surface micromachining technology

摘要

In the last decade, examples of devices manufactured with SUMMiT technology have demonstrated the capabilities of polysilicon surface micromachining. Currently we are working on enhancements to this technology to enable Microfluidics and BioMEMS. The goal is to ultimately provide functionality that is not feasible with other microfabrication technologies. The enhancements build on the key features of surface micromachining: manufacturability and compatibility with CMOS processing, and allow us to leverage the investment already made in the microelectronics processing technology.