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Radial dependence of mass sensitivity for modified-electrode quartz crystal resonators

机译:修饰电极石英谐振器的质量敏感性的径向依赖性

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Quartz crystal resonators (QCR) with "modified electrode" geometries have been investigated as detectors in liquids and shown to have high sensitivity to the electrical properties of the load, caused by changes in the electrostatic capacitance. However, the ability of the crystal plate to have a stable vibration under the load is often impaired, due to the electrode geometry. In the present work, the mass sensitivity profile at the sensing surface is analytically calculated for various modified-electrode QCRs. The sensing surface is divided into a fully electroded, a partially electroded and an unelectroded region. The efficiency of each region is evaluated to determine possible design trade-offs for stable modified electrode QCRs. It is shown that, for some values of the electrode mass loading factor, the efficiency of the partially electroded region can be significant and thus must be accounted for as part of a stable sensing surface. Experimental measurements of the differential mass sensitivity were performed for a modified-electrode QCR and compared to theory.
机译:具有“修饰电极”几何形状的石英晶体谐振器(QCR)已作为液体中的检测器进行了研究,并显示出对由于静电电容变化而引起的负载电学特性的高度敏感性。但是,由于电极的几何形状,常常会损害晶体板在负载下具有稳定振动的能力。在当前的工作中,针对各种修饰电极QCR解析地计算出感测表面的质量敏感性分布。感测表面分为完全电极化,部分电极化和非电极化区域。评估每个区域的效率,以确定稳定的修饰电极QCR的可能设计折衷。结果表明,对于电极质量负载系数的某些值,部分电极化区域的效率可能很高,因此必须考虑为稳定感测表面的一部分。对修饰电极QCR进行了差分质量灵敏度的实验测量,并与理论进行了比较。

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