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A computationally practical approach to simulating complex surface-micromachined structures with fabrication non-idealities

机译：一种具有制造非理想性的复杂表面微机械结构仿真的计算实用方法

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《》|1995年||共1页
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Yie; H.; Bart; S.F.;
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中图分类无线电电子学、电信技术 ;
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机译：一种具有制造非理想性的复杂表面微机械结构的计算实用方法

A computationally practical approach to simulating complex surface-micromachined structures with fabrication non-idealities

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