A 32*32 two-dimensional photodetector array using a-Si pin photodiodes and poly-Si TFTs integrated on a transparent substrate

摘要

We have designed, fabricated, and characterized a 32*32 two-dimensional photodetector array using amorphous silicon (a-Si) pin photodiodes and polysilicon (poly-Si) TFTs integrated on a transparent substrate. This work demonstrates the feasibility of a light-transmitting two-dimensional photodetector array for use in parallel optoelectronic systems such as free-space photonic switching systems.