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Sol-Gel Synthesis of Thick Ta_2O_5 Films for Photonic Band Gap Materials

机译:光子带隙材料的Ta_2O_5厚膜的溶胶凝胶合成

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PVP has been shown to be an effective binder material in the sol gel synthesis of thick, crack free Ta_2O_5 films for high temperature applications. This study was undertaken to investigate the effect of PVP interaction with the solvent and metal complex in the sol precursor via NMR, FTIR, TGA, XPS, SEM, and XRD analytical tools. It has been reported that the type of Ta_2O_5 films obtained from sols of different ages vary in thickness and microstructure, suggesting that there was a progressive change occurring in the composition of the sol precursor with time. This is due to different particle growth rates around metallic centers during Ta—O—Ta network formation resulting in spherical particles. This type of microstructure hydrogen bonds with the PVP matrix in a manner that effectively relieves stresses that occur in the film during solvent removal and calcination processes. The resulting films are found to be stable and crack free with maximum thickness of films deposited from freshly prepared sols. With time, there is continued polycondensation of the Ta—O—Ta network yielding denser, thinner films with particles of larger diameter.
机译:在用于高温应用的厚,无裂纹的Ta_2O_5薄膜的溶胶凝胶合成中,PVP已被证明是一种有效的粘合剂材料。通过NMR,FTIR,TGA,XPS,SEM和XRD分析工具研究了PVP与溶胶前体中的溶剂和金属络合物之间的相互作用。据报道,从不同年龄的溶胶获得的Ta_2O_5薄膜的类型在厚度和微观结构上是不同的,这表明溶胶前体的组成随时间发生了逐渐变化。这是由于在形成Ta-O-Ta网络的过程中,金属中心周围的颗粒生长速率不同,从而导致形成球形颗粒。这种类型的微结构氢以有效缓解溶剂去除和煅烧过程中膜中出现的应力的方式与PVP基质键合。发现所得膜稳定且无裂纹,并且具有由新鲜制备的溶胶沉积的最大厚度的膜。随着时间的流逝,Ta-O-Ta网络不断缩聚,形成具有更大直径颗粒的致密,更薄的薄膜。

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