Low voltage adaptive 128×128 element liquid crystal micro lens array with electric tunable focal length

摘要

A new LC micro-lens array of 128×128 elements circular hole top electrode is proposed, which is fabricated by both the lithography and HCL etching methods. Some valuable results are got in tests. The focal length of LC micro-lens array is 50μm ~ 400μm under operating voltage from 0.2V_(RMS) to 0.5V_(RMS) The lowest operating voltage of LC micro-lens array is 0.2V_(RMS). The size of focus is about 10μm. And the PSF of LC micro-lens array is close to the theory values. The optical multiple images which are got by LC micro-lens array are clear.