Process Optimized Beam Profiles for Laser Micromachining

摘要

The Gaussian laser beam profile is for many applications in laser micromachining not optimally adapted. Therefore process optimized beam profiles with e.g. Top-Hat or torus shape are required to improve process quality. Other applications require multiple beam-lets for parallel processing to increase process efficiency. TOPAG's new diffractive FBS (Fundamental Beam-Mode-Shaper) concept allows the generation of square, round or line Top-Hat profiles with near diffraction limited size for smallest possible patterning and spot sizes with just a few micrometers. FBS elements can be placed at nearly any position within the beam path and do not substitute the focusing system (objective) but can be integrated in existing optics. Furthermore the FBS beam shapers feature very homogeneous beam profiles (+/- 2.5%), a high efficiency (> 95%) and simplified handling, In combination with diffractive beam splitters the quality and throughput of the laser process can be improved as a result of several optimized beams from just one beam source. TOPAG presents also application results using FBS shapers and diffractive beam splitters for OLED scribing.