Precision laser ablation of wide-band-gap materials using VUV-UV multiwavelength excitation

摘要

Abstract: Novel ablation of wide band-gap materials such as fused quartz and GaN by multiwavelength excitation using a VUV-UV laser system is reviewed. Simultaneous irradiation of VUV and UV laser beams emitted form a VUV Raman laser presents great potential for precision from microfabrication of the materials. The mechanism and the role of VUV beams in this process are made clear on the basis of band structure. The advantages of this technique are discussed in comparison with the conventional single wavelength ablation. Furthermore, another novel ablation of glass materials using a conventional UV laser, referred to as 'laser-induced plasma assisted ablation (LIPAA)', is introduced. By LIPAA, a high quality micrograting structure is fabricated on fused quartz. !19