Binary optical elementws (BOE's) are considered functional devices for modern optical systems and play an important role in such fields as optical interconnection,optical signal porcessing and array illumination.They feature a thin,planar and light weight structure and flexibility in design.Although their fabrication process has been showing a significant porgress in recent years,the generation of a nearly ideal binary structure remains difficult and fabrication errors still are the main contributors to a loss in diffraction efficiency of the order of 5 to 20
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