首页> 外文会议>International Symposium on High Temperature Corrosion and Protection of Materials pt.1; 20040516-21; Les Embiez(FR) >High Temperature Al/Si Diffusion Coatings Deposited by Chemical Vapor Deposition in Fluidized Bed Reactors (CVD-FBR)
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High Temperature Al/Si Diffusion Coatings Deposited by Chemical Vapor Deposition in Fluidized Bed Reactors (CVD-FBR)

机译:化学气相沉积在流化床反应器中沉积的高温Al / Si扩散涂层(CVD-FBR)

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摘要

The ceramic coatings are excellent candidates to protect metallic structures that work at high temperature. Inside these ceramic coatings, the mullite is a good option, since it presents very good mechanical properties, great corrosion resistance, high thermal resistance and high durability. The CVD-FBR (Chemical Vapor Deposition by Fluidized Bed Reactor) is an interesting technique to create adherent films on metallic surfaces to protect them. Furthermore, this method is cheap and easy to apply, and the most important characteristic is that could be applied at much lower temperatures comparing for example to pack cementation. The first step to obtain mullite coatings would be the co-deposition of aluminium and silicon coatings by CVD-FBR to decrease the thermal mismatch between substrate and coating. Thermodynamic calculations were made before experiments to study the oxidation system and optimize the working conditions using Thermo-Calc code. These depositions take place in a fluidized bed reactor. The base material used was an AISI 304 stainless steel. This technique is based upon the reaction among aluminium chloride (AlCl_(3 (g))) and silicon chloride (SiCl_(4(g))), among other precursor species. The optimization of the conditions (deposition temperature, time, fluxes, etc) is discussed in the present work. The coatings design is completed with diffusion simulations during the CVD process and subsequent heat treatment. The analysis of results is carried out by X-Ray Diffraction (XRD), Scanning Electron Microscopy (SEM) and Energy Dispersion Spectroscopy (EDS) methods. In addition further oxidation of these precursor coatings is made in order to obtain the definitive system of protective ceramic layer. The oxidation of coating samples is made at different temperatures and time conditions to obtain the best mullite structure, based on predicted thermodynamic calculations by Thermo-Calc.
机译:陶瓷涂层是保护在高温下工作的金属结构的极佳选择。在这些陶瓷涂料中,莫来石是很好的选择,因为它具有非常好的机械性能,出色的耐腐蚀性,高耐热性和高耐久性。 CVD-FBR(通过流化床反应器进行化学气相沉积)是一种有趣的技术,可在金属表面形成粘附膜以保护它们。此外,该方法便宜且易于应用,并且最重要的特征是与例如填充胶结相比可以在低得多的温度下应用。获得莫来石涂层的第一步是通过CVD-FBR共沉积铝和硅涂层,以减少基材和涂层之间的热失配。在进行实验以研究氧化系统并使用Thermo-Calc代码优化工作条件之前,进行了热力学计算。这些沉积发生在流化床反应器中。所使用的基础材料是AISI 304不锈钢。该技术基于氯化铝(AlCl_(3(g)))和氯化硅(SiCl_(4(g)))等其他前体物质之间的反应。在本工作中讨论了条件(沉积温度,时间,通量等)的优化。通过在CVD工艺和后续热处理过程中进行扩散模拟,可以完成涂层设计。结果分析是通过X射线衍射(XRD),扫描电子显微镜(SEM)和能量分散谱(EDS)方法进行的。另外,对这些前体涂层进行进一步的氧化,以便获得保护性陶瓷层的确定体系。基于Thermo-Calc预测的热力学计算,可以在不同的温度和时间条件下对涂层样品进行氧化,以获得最佳的莫来石结构。

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