Relationships between Textures and Surface Roughness, Frictional Behavior, Erosion and Corrosion Properties of TiN Films

摘要

TiN coated films were prepared by a reactive ion physical vapor deposition method. In this research, we studied the relationships between textures and friction coefficient, erosion-corrosion resistance and corrosion resistance in textured TiN films. The surface roughness of (115) textured TiN films is lower than that of (111) textured TiN films. The friction coefficient of (115) textured surface is similar with that of (111) textured surface of TiN coated films. The erosion-corrosion and corrosion resistance of (115) textured surface is better than that of (111) textured surface of TiN coated films.