Metal-containing diamond-like carbon composite films for fatigue frequency monitoring

摘要

Metal-containing diamond-like carbon (Me-DLC) composite films are attractive as a kind of smart sensors for corrosive environment because of their chemical stability. Those were prepared by hybrid deposition technique combining chemical and physical vapor deposition processes. In this paper, Me-DLC composite films to which molybdenum was selected as an addition were evaluated as a fatigue sensor. Vibration fatigue tastings were performed under atmospheric conditions, and the results indicate the possibility of monitoring sensor using of Me-DLCs.