Development of a Fast Tool Servo for Ultraprecision Turning

摘要

In order to implement dynamic control during ultrapre cision turning operation, a piezo-electrically driven fast tool servo is developed. The parallel flexure hinge is utilized to guide the moving platform and to provide preload. A high resolution capacitive sensor is used to measure the displacement of the fast tool servo for closed loop control. With consideration of the driving circuit, the dynamic model of the fast tool servo has been established. The effect of the driving circuit on the dynamic response of the fast tool servo is investigated. The experimental tests have been carried out to verify the established model and the performance of the fast tool servo.