High Resolution Stepper for AM-OLED Display Development

摘要

A step and repeat photolithography stepper utilizing a dual lens architecture is presented for use in active matrix OLED display development. The dual lens architecture enables a high resolution lens optimized for poly-Si display driver circuits to be used in conjuction with a lower resolution lens optimized for the matrix TFT's on a single platform. Imaging data from the dual lens system shows its capabilities exceed standard overlay and stitching performance requirements.