Experimental Study on Surface Quality of AI_2O_3 Engineer Ceramics in Ultrasonic Vibration Lapping

摘要

Hard-brittle materials have been popular used in manufacture experience because of their excellent performances. However the low plasticity, frangibility and non-conduction make their machining very difficult, especially in ultra-precise surface fabrication. Therefore, ultrasonic vibration is introduced to conventional lapping for the purpose of higher removal rate and fine surface quality. The ultrasonic vibration lapping principle is introduced, and the acoustic model of ultrasonic lapping is proposed. In addition, the experimental formulas of surface roughness in ultrasonic lapping is gained by orthogonal regression analysis, the optimum lapping parameters is put forward and the primary and secondary influencing order of parameters on surface roughness is presented through the conventional and ultrasonic vibration lapping contrast experiment of Al_2O_3 engineer ceramics with different vibration models and different lapping parameters. And combining with SEM, the influencing rule of such different lapping parameters as rotational speed, feed speed, oilstone grit and lapping depth on surface quality is studied.