Acceleration of Lattice Monte Carlo Simulations and Application to Diffusion/Clustering of As at High Concentrations

摘要

Kinetic lattice Monte Carlo (KLMC) simulations enable practical atomic-scale modeling of device fabrication processes. In this paper, we discuss implementation of an acceleration algorithm which can provide orders of magnitude speed-up. We apply the result to diffusion and clustering of As at very high doping levels, which are critically important in the formation of ultrashallow junctions.