New micro machined gas sensors combined with intelligent signal processing allowing fast gas identification after power-up

摘要

In this paper we present a new measurement method for identifying different gases and quantifying gas concentrations within a few seconds after power up of a semiconductor gas sensor. Instead of the absolute sensor conductance, the slope of the conductance after temperature changes is evaluated for the identification of different gases and the estimation of gas concentration as this gives more stable performance. A new generation of micro machined gas sensors with nano-structured Pd- and Pt-doped SnO_2 sensitive layers are used which were developed within the EU-project NANOSENSOFLEX. These microsensors are characterized by low thermal masses due to advanced silicon micro machining and new highly sensitive nano-structured sensor-materials.