Growth of Catalytic Metal Composed Amorphous Carbon Films and Carbon Nanotube Using Large-Area Surface-Wave Plasma

摘要

Effects of catalytic metal composition on the characteristics of amorphous carbon films deposited with the surface-wave plasma CVD have been studied. Transition metal atoms such as Fe and Ni were tested as the catalyst for the growth of sp~2 carbon clusters by introducing them using the vacuum evaporation technique on the silicon substrates. These metal atoms or metal-carbon clusters are expected to form the conduction channels inside the film. Film characteristics such as electrical conductivity, surface morphology and atomic or molecular bonding structures have been studied. By heating silicon substrates up to 750℃, carbon nanotubes were also produced using large-area surface wave plasma. Field emission characteristics and Raman spectrum were also investigated.