Completely Sealed Micro Screw Pump Driven by External Magnetic Field for Controlling Minute Amount of Liquid

摘要

In recent years, research and development of the micro-fluidic systems have been activated in the field of chemical engineering and biotechnology. Micro-fluidic systems have been realized by micromachine technology and MEMS technology. Such systems are an essential element for miniaturization of chemical analysis reaction systems. Furthermore, micro pumps are an essential element for a realization of micro-fluidic systems. The aim of this research is a development of a micro screw pump which will be incorporated in micro-fluidic systems. This pump aims to control minute amounts of liquids. Full length and diameter of this pump are 41mm and 16mm, respectively. The features of this pump are (1) the pump has built-in actuator, (2) the pump can flow liquid in both direction, and (3) the pump is almost nonpulsatile pump. In this paper, the structure, principle and the characteristics of this pump are shown.