Modeling of High-speed Diamond Microswitch

摘要

CVD grown diamond is a new attractive MEMS material and has been used here to realize a microswitch with extreme properties. Still at present the technological development requires a fast turnaround of the design based on technological parameters. However FEM simulations are very time consuming, thus a simple model has been developed, allowing fast calculations to predict device performance. Results obtained by the different approaches are given and compared to measured values.