Investigation of the Dynamics of Microdevices - as a Design Tool

摘要

When designing microaccelerometers, microgyroscopes and other microdevices, there is a strong need for dynamic understanding in system level. Thus, dynamic simulation is a part of many CAD tools for MEMS. In this work, a relatively simple approach is presented for the study of the dynamics of microdevices. The theoretical derivation of the equations of motion is based on the Newton-Euler approach and provides a matrix form that is convenient to integrate. The dynamical model combined with models for electrostatic actuation and squeeze film effects is verified by comparison with experimental results: the decaying motion of a microresonator due to an electrostatic impulse. Good agreement between simulation and measurements is shown. The pull-in angle and voltage are simulated and compared to theoretical calculations that were presented by the authors. Finally, the model is used for parametric study of the influence of geometrical variations on the dynamics of a microgyroscope.