Development of Three Dimensional Measuring System for Making Precise Patterns on Curved Surface Using Laser Drawing

摘要

A three dimensional measuring system for making precise patterns on curved surface by laser exposure is developed. A interferometer which has been used for two dimensional measurement is improved to measure the position and orientation of the moving stage in three dimensional space. The moving stage with several corner cube arrays can reflect laser beams in the large moving range for interference of the reference laser beam. Processing interference images in the three different directions can realize the three dimensional measurement. Singular value decomposition method is applied to design of parameters for isotropic measuring resolutions. Moreover, error analysis is performed to obtain tolerances of various mechanical errors.