Discharge lasers pumped by double-discharge generators based on inductive energy storage

摘要

Generators with inductive energy storage (GIES) are developed for laser application. Discharge and laser parameters in high-pressure gas mixtures are studied. It was shown that the IES generator produces high-voltage prc-pulsc and sharp increase of discharge current which allows to form long-lived stable discharge in different gas mixtures. Improve of both pulse duration and output energy was achieved for XeCl-, XeF- and KrF excimer lasers. Maximal at that date radiation power, output energy and laser pulse duration of N_2 laser were obtained. Efficient operation on CO_2 molecules with high peak power was demonstrated. Ultimate efficiency of HF(DF) non-chain lasers was achieved.