Mechatronic approach to sensing system design for an Optical Disc Mastering rotor

摘要

Increasing data densities on optical discs such as CD, DVD and Blu-Ray Disc (BD) requires increasing positioning accuracy in their production machines. The Advanced Mechatronics group of the Delft University of Technology designed and realized a magnetically suspended rotor with positioning accuracy better than 1 nm_(RMS) at standstill, required for the production of BD masters. This paper shows how a mechatronic approach was used, to meet extreme specifications by a sensing subsystem consisting of relatively simple components: fourteen off-the-shelf sensors, an isolated metrology frame and low-cost optimized A/D converters.