High Resolution Electrodes Fabrication for OTFT Array by usingMicrocontact Printing and Room Temperature Process

摘要

The flexible organic thin film transistor (OTFT)array to use as a switching device for an organic lightemitting diode (OLED) was designed and fabricatedin the microcontact printing and room temperatureprocess. The gate, source, and drain electrodepatterns of OTFT were fabricated by microcontactprinting process. The OTFT array with dielectriclayer and organic active semiconductor layer formedat room temperature or at a temperature lower than40 . The microcontact printing process using SAMand PDMS stamp made it possible to fabricate OTFTarrays with channel lengths down to even submicronsize, and reduced the fabrication process by 10 stepscompared with photolithography. Since the processwas done in room temperature, there was no patternshrinkage, transformation, and bending problemappeared. Also, it was possible to improve electricfield mobility, to decrease contact resistance, toincrease close packing of molecules by SAM, and toreduce threshold voltage by using a big dielectric.