Copper Bus for TFT-LCD

摘要

We have developed a copper-based TFT fabrication technology to improve the screen uniformity. For the copper-based TFT fabrication technology, we have overcome many issues unsolved until now. Those are (1) inter-layer diffusion & adhesion, (2) efficient chemicals for etch & strip, (3) no change of TFT device characteristics due to Cu contamination. And we have developed 15.1' QUXGA and 15.0' UXGA prototypes with Cu-bus line.