DESIGN OF AN ELECTROCHEMICAL CELL FORMICROMACHINING APPLICA APPLICATIONS TIONS

摘要

Electrochemical machining is known to possess certain advantages for micromachiningrnapplications, among them very low tool deflection, and zero tool wear. However, dimensionalrnprecision is a potential drawback for this technology. Here we describe the development of arnthree–axis pulsed ECM machine designed specifically for machining features with dimensions lessrnthan one millimeter. Preliminary tests show that the machine is able to machine grooves in purernnickel substrates, using a 3M NaNO3 electrolyte. The effects of electrolyte concentration, toolrntraversing speed, machining gap, and process parameters on metal removal and edge quality arernpresented.