New 3D Surface Profile Measurement Based On Phase-shift Interfering Technology

摘要

Three-frame phase-shift algorithms and digital filer method that is based on the phase-shift interfering technology was proposed for measurement for 3D surface profile by which Modulation M and relative-surface-height Z were defined as the most important references. Finally, 3D surface profile of the part was obtained through data-processing. A great many of experiments showed that the algorithm is accurate, and if does not destroy the surfaces of parts. The vertical resolution is better than 10nm.