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Surface quality inspection using a laser beam with a regular dynamic interference pattern

机译:使用具有规则动态干涉图样的激光束进行表面质量检查

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Abstract: A new testing method of the surface roughness of transparent and reflecting objects is discussed. The method is based on the usage of the probing laser beam with spatial modulation in the form of a regular interference pattern, and of the contrast change effect of the pattern in the scattered light depending on the tested surface roughness parameters. A theory of the technique is presented. Various types of devices for the dynamic interference field formation in the probing laser beam (on the basis of interferometers, acoustic-optical modulators, optical and holographic elements with a piezoelectric deflector) are considered. A specialized processor of dynamic interference signals has been used to convert the measured contrast values. The experimental results of surface roughness testing of television screens are presented. The possibility of the technique usage in small angle scattering investigations is discussed. Consideration is also given to the feasibility of the technique industrial application in the rapid testing of the products surface quality while in production.!14
机译:摘要:讨论了一种新的透明和反射物体表面粗糙度的测试方法。该方法基于以规则干涉图案形式进行的具有空间调制的探测激光束的使用,以及该图案在散射光中取决于测试的表面粗糙度参数的对比度变化效果的使用。介绍了该技术的理论。考虑了用于在探测激光束中形成动态干涉场的各种类型的装置(基于干涉仪,声光调制器,具有压电偏转器的光学和全息元件)。动态干扰信号的专用处理器已用于转换测得的对比度值。给出了电视屏幕表面粗糙度测试的实验结果。讨论了在小角度散射研究中使用该技术的可能性。在生产过程中对产品表面质量进行快速测试时,还要考虑技术工业应用的可行性。14

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