Micro and Nano Robotic Technologies

摘要

Today robotic technology can be developed and advanced a lot from industrial robotic manipulation to the micro and nano manipulations. We have been proposed "Nano Laboratory" consisted of the capabilities of nanofabrication, nanoinstrumentaion and nanoassembly to make three dimensional structure, devices and systems in the nanoworld. First the nanorobotic manipulation system is introduced to realize these capabilities inside a scanning electron microscope (SEM) and a transmission electron microscope (TEM). Then some precursors are introduced into the working small space in the nanoworld, so that the cutting, bending and fixing operation in the nanoworld will be realized using nanomanipulator, electron-bean-induced deposition (EBID) and other methodologies as in the macro world. After making the three dimensional structure, nano devices such as sensor and actuator can be fabricated.