COMPUTATIONAL FLUID DYNAMICS APPLICATIONS TO CLEANROOM DESIGN

摘要

A Computational Fluid Dynamics (CFD) commercial program is used to assist the design effort of a Class 1 cleanroom. Two cases are studied. The first case studies the design of a modular plenum system. The impact of the size of each plenum module on the modular plenum system performance is studied. A 33% less pressure drop is achieved when a regularly design modular plenum system is redesigned carefully. The second case studies the impact of tool geometry and location on the flow patterns and contamination control in a cleanroom. A platform is placed in the cleanroom when flow simulations by the CFD program are carried out. Flow laminarity in the cleanroom is investigated for two designs, which are primarily the same except that in one design the platform is located directly in contact with a cleanroom wall and in the other the platform is located 12 inches away from the cleanroom wall. It is observed that the design with a gap in between the platform and cleanroom significantly reduces air turbulence above the platform compared to the design with no gap. A platform made of 55% perforated plates is observed highly efficient in reducing air turbulence both above and below the platform in both designs with or without gap in between the platform and cleanroom wall.