Design and Fabrication of C/W hard X-ray Supermirrors

摘要

We designed two kinds of supermirrors composed of Carbon and Tungsten in current paper. Using Simplex Optimization method, we designed C/W supermirror with broad incident angular range (0.5° ～ 0.9°) at Cu Kα line (λ = 0.154nm). Connecting the analytical method, based on oversimplified analytical and semi-empirical formulas, with the Simplex Optimization method, we designed C/W supermirror with broad photon energy range (16 ～ 25keV), at θ = 0.5°. The negative effect, due to the interfacial roughness and diffusion between the adjacent sublayers in multilayer, also emerges in simulating the practice performance of the both supermirrors. The supermirrors with broad incident angular range were fabricated by DC magnetron sputtering, because such supermirror is easy to be measured at our lab, using X-ray diffractormter. The measured reflectivity near the first order Bragg peak is about 30% at Cu Kα line. The roughness factor is about 0.84nm by the fitting data.