Holographic diffractive optical element used for fabricating 3D photonic crystals

摘要

A simple holographic 3D photonic crystal fabrication system is presented. The key element in the system is a HDOE made with holographic approach. The HDOE can generate four beams with single illuminating beam to form a 3D interference pattern. The incident angle of the outer beams and beam intensity ratio of the central beam to the outer beam can be adjusted in HDOE fabrication process. Computer simulation demonstrates that to obtain properly connected lattice structure in photoresist, beam intensity ratio and exposure dosage must be considered simultaneously. Experimental result has verified the effectiveness of the technique.